Sputtering Process: Blue Wave Semiconductors

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Blue Wave Semiconductors, Inc. is a global leader in developing advanced thin film and nanomaterials deposition systems, tool components, and nanotechnology based electronic and photonic devices.

Sputtering is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic ions. It is commonly used for thin-film deposition, etching and analytical techniques

Sputter deposition is a physical vapor deposition (PVD) method of depositing thin films by sputtering, that is ejecting, material from a “target,” that is source, which then deposits onto a “substrate,” such as a silicon wafer.

Blue Wave Semiconductors specializes in:
Manufacturing of semiconductor materials and tools
Wafer heating products and processing tools for R&D
Innovative thin films, coatings and devices
RD Contracts for Department of Defense (DoD) & Large Corporations

NanoFocus µsprint: Fully automated wafer inspection

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The ideal combination of high resolution and fast measurement
speed for the fully automated 3D inspection of interconnectors

Especially in quality assurance and process monitoring, the μsprint technology provides an optimal combination of resolution and speed. The high resolution allows the detection of structure heights down to a few micrometers with highest reproducibility. The μsprint technology is applicable on almost all surface types. The great dynamics of the sensor ensure a reliable separation of structures and substrates.

Pre-alignement, alignment and OCR/DDM/Bar Code Reading are part of the automated handling process. Measurement result data is transferred to the process hosts, either by SECS-GEM or customer-specific intercommunication systems.

[FROM NanoFocus AG]